芯片污染检测/总结
发布时间:2008/6/5 0:00:00 访问次数:286
对各种污染形式的检测在第八章和第十四章中具体描述。表5.35总结了有关洁净室洁净度的规范。
year of production 2001 2006 2012
-------------------------------------------------------------------------------------------------------
line width (nm) 150 100 50
-------------------------------------------------------------------------------------------------------
air critical particle size (nm) 8 2 1
-------------------------------------------------------------------------------------------------------
water oxidizable carbon (ppb) 1 <1 <1
-------------------------------------------------------------------------------------------------------
water dissolved oxygen (ppb) 1-10 1 1
-------------------------------------------------------------------------------------------------------
water particle>critical size <0.2 per ml <0.2 per ml <0.2 per ml
-------------------------------------------------------------------------------------------------------
liquid particles>critical size <0.5 per ml <0.5 per ml <0.5 per ml
-------------------------------------------------------------------------------------------------------
hcl, h2o impurities (ppt) <1000 <1000 <1000
-------------------------------------------------------------------------------------------------------
beol solvents k, li, na (ppt each) <1000 <1000 <1000
-------------------------------------------------------------------------------------------------------
pou gases particles (per liter) 2 2 2
表5.35 sia roadmap projections (micro october 1998 p.54)
year of production 2001 2006 2012
-------------------------------------------------------------------------------------------------------
line width (nm) 150 100 50
-------------------------------------------------------------------------------------------------------
air critical particle size (nm) 8 2 1
-------------------------------------------------------------------------------------------------------
water oxidizable carbon (ppb) 1 <1 <1
-------------------------------------------------------------------------------------------------------
water dissolved oxygen (ppb) 1-10 1 1
-------------------------------------------------------------------------------------------------------
water particle>critical size <0.2 per ml <0.2 per ml <0.2 per ml
-------------------------------------------------------------------------------------------------------
liquid particles>critical size <0.5 per ml <0.5 per ml <0.5 per ml
-------------------------------------------------------------------------------------------------------
hcl, h2o impurities (ppt) <1000 <1000 <1000
-------------------------------------------------------------------------------------------------------
beol solvents k, li, na (ppt each) <1000 <1000 <1000
-------------------------------------------------------------------------------------------------------
pou gases particles (per liter) 2 2 2
表5.35 sia roadmap projections (micro october 1998 p.54)
对各种污染形式的检测在第八章和第十四章中具体描述。表5.35总结了有关洁净室洁净度的规范。
year of production 2001 2006 2012
-------------------------------------------------------------------------------------------------------
line width (nm) 150 100 50
-------------------------------------------------------------------------------------------------------
air critical particle size (nm) 8 2 1
-------------------------------------------------------------------------------------------------------
water oxidizable carbon (ppb) 1 <1 <1
-------------------------------------------------------------------------------------------------------
water dissolved oxygen (ppb) 1-10 1 1
-------------------------------------------------------------------------------------------------------
water particle>critical size <0.2 per ml <0.2 per ml <0.2 per ml
-------------------------------------------------------------------------------------------------------
liquid particles>critical size <0.5 per ml <0.5 per ml <0.5 per ml
-------------------------------------------------------------------------------------------------------
hcl, h2o impurities (ppt) <1000 <1000 <1000
-------------------------------------------------------------------------------------------------------
beol solvents k, li, na (ppt each) <1000 <1000 <1000
-------------------------------------------------------------------------------------------------------
pou gases particles (per liter) 2 2 2
表5.35 sia roadmap projections (micro october 1998 p.54)
year of production 2001 2006 2012
-------------------------------------------------------------------------------------------------------
line width (nm) 150 100 50
-------------------------------------------------------------------------------------------------------
air critical particle size (nm) 8 2 1
-------------------------------------------------------------------------------------------------------
water oxidizable carbon (ppb) 1 <1 <1
-------------------------------------------------------------------------------------------------------
water dissolved oxygen (ppb) 1-10 1 1
-------------------------------------------------------------------------------------------------------
water particle>critical size <0.2 per ml <0.2 per ml <0.2 per ml
-------------------------------------------------------------------------------------------------------
liquid particles>critical size <0.5 per ml <0.5 per ml <0.5 per ml
-------------------------------------------------------------------------------------------------------
hcl, h2o impurities (ppt) <1000 <1000 <1000
-------------------------------------------------------------------------------------------------------
beol solvents k, li, na (ppt each) <1000 <1000 <1000
-------------------------------------------------------------------------------------------------------
pou gases particles (per liter) 2 2 2
表5.35 sia roadmap projections (micro october 1998 p.54)
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